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Toward sub-20 nm hybrid nanofabrication by combining the molecular ruler method and electron beam lithography

C B Li, T Hasegawa, H Tanaka, H Miyazaki, S Odaka, K Tsukagoshi, M Aono.
Nanotechnology 21 [49] 495304. 2010.
https://doi.org/10.1088/0957-4484/21/49/495304

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