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Membrane-Type Surface Stress Sensor with Piezoresistive Readout

Frédéric Loizeau, Terunobu Akiyama, Sebastian Gautsch, Peter Vettiger, Genki Yoshikawa, Nico de Rooij.
Procedia Engineering 47 1085-1088. 2012.
Open Access Elsevier BV (Publisher)

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