HOME > Article > DetailNano/Micro Patterning of Inorganic Thin FilmsKunihito Koumoto, Noriko Saito, Yanfeng Gao, Yoshitake Masuda, Peixin Zhu. Bulletin of the Chemical Society of Japan 81 [11] 1337-1376. 2008.https://doi.org/10.1246/bcsj.81.1337 NIMS author(s)SAITO, NorikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:37:51 +0900 Updated at: 2026-01-22 05:40:52 +0900
