Diffusion of ion implanted aluminum in Silicon Carbide | SAMURAI, NIMS Researchers Directory Service

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Diffusion of ion implanted aluminum in Silicon Carbide

木島弌倫, 多島容, W.D.Kingery.

J.Chem.Phys. 2592. 1982.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 10:25:05 +0900 Updated at: 2022-09-05 10:25:05 +0900

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