HOME > 論文 > 書誌詳細Controlled generation of pulse-modulated RF plasma for materials processingRubin Ye, Takamasa Ishigaki, Tadahiro Sakuta. Plasma Sources Science and Technology 14 [2] 387-396. 2005.https://doi.org/10.1088/0963-0252/14/2/022 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 14:43:34 +0900 更新時刻: 2025-12-22 05:22:09 +0900
