Real-Time Observation of Ultra Thin Silicon Oxide Film Growth by Rapid Ellipsometry.
(高速エリプソメトリーによる極薄酸化シリコン膜成長の実時間観察.)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:00 +0900 Updated at: 2022-11-15 00:39:00 +0900