HOME > Article > DetailPreparation of BN films by r.f. thermal plasma Chemical vapour deposition松本精一郎, 西田典弘, 明石和夫, 須貝賢一. Journal of Materials Science 713. 1996.NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 10:43:30 +0900 Updated at: 2022-09-05 10:43:30 +0900
