Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

Genki Yoshikawa, Terunobu Akiyama, Frederic Loizeau, Kota Shiba, Sebastian Gautsch, Tomonobu Nakayama, Peter Vettiger, Nico Rooij, Masakazu Aono.

Sensors 12 [11] 15873-15887. 2012.

Open Access MDPI AG (Publisher)

Created at: 2016-05-24 16:52:13 +0900Updated at: 2024-05-01 06:25:27 +0900