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Resuscitation of Carbon-Contaminated Mirrors and Gratings by Oxygen-Discharge Cleaning. 1.Efficiency Recovery in the 4-40eV rang

小出常晴, 柳原美広, 相浦義弘, 佐藤繁, 設楽哲夫, 藤森淳, 福谷博仁, 庭野道夫, 加藤博雄.
Applied Optics 3884. 1987.

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