Analysis of Contamination Layer of InP During LPE Process by Synchrotron Radiation Excited X-Ray Fluorescence.
(InP LPEプロセスにおける不純物層のSR蛍光X線分析法による分析.)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:30:39 +0900Updated at: 2018-12-14 23:47:09 +0900