ＳｉＣ及び（Ｓｉ―Ｃ―Ａｌ―Ｏ）皮膜の重水素イオン照射
(Deuterium Ion Irradiation of SiC and Si-C-Al-O Compound Films on Molybdenum)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:26:31 +0900 Updated at: 2019-02-09 00:53:53 +0900