HOME > 論文 > 書誌詳細Effects of Plasma and/or 193nm Excimer laser Irradiation on the surface in Chemical Vapor Deposition of Boron Films from B2H6+He小松正二郎, 守吉佑介. Applied Physics Letters 608-610. 1991.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:33:19 +0900 更新時刻: 2022-09-05 10:33:19 +0900
