First-principles study of hydrogen-enhanced phosphorus diffusion in silicon
(Si中のリン拡散過程における水素の働き)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-10-26 15:44:01 +0900 Updated at: 2026-11-02 05:39:39 +0900