Ultramicro Fabrications on Fe-Ni Alloys Using Electron-Beam Writing and Reactive-Ion Etching
(電子線描画法と反応性イオンエッチング法によるFe-Ni合金の超微細加工)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:08 +0900Updated at: 2022-11-15 00:39:08 +0900