Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp 3-bonded BN films
(レーザ・プラズマCVDによるBN薄膜における波紋パターンを伴うミクロコーン形成)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 17:44:38 +0900Updated at: 2024-05-03 10:54:24 +0900