HOME > 論文 > 書誌詳細Synthesis of boron nitride films by microwave plasma chemical vapor deposition in fluorine-containing gasesMATSUMOTO, Seiichiro, 張文軍, 張文軍. JAPANESE JOURNAL OF APPLIED PHYSICS 40 [6A] L570-L572. 2001.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 11:43:51 +0900 更新時刻: 2018-12-14 21:57:43 +0900
