Preparation of Silicon Carbidr Films on Molybdenum by RF Reactive Ion Plating | SAMURAI, NIMS Researchers Directory Service

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(Preparation of Silicon Carbidr Films on Molybdenum by RF Reactive Ion Plating)

M.Fukutomi, M.Okada, R.Watanabee, M.Fukutomi, M.Okada, R.Watanabee.

Trans.NRIM 26 1. 1984.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 11:21:27 +0900 Updated at: 2018-12-14 23:16:53 +0900

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