（マグネトロンスパッタ法による）炭素過剰ＴｉｘＣ１―ｘの性質と構造
(Property and Structure of Carbon Excess TixC1-x Diposited on Mo by Magnetron Sputlering)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 10:24:11 +0900 Updated at: 2022-09-05 10:24:11 +0900