HOME > Article > DetailNovel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell ApplicationChi-Hsien Huang, Makoto Igarashi, Susumu Horita, TAKEGUCHI, Masaki, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa. JAPANESE JOURNAL OF APPLIED PHYSICS 49 [4] 04DL16(1)-04DL16(5). 2010.NIMS author(s)TAKEGUCHI, MasakiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:15:12 +0900 Updated at: 2018-12-15 01:37:41 +0900