Growth mechanism of c-axis-oriented AlN on (0 0 1) diamond substrates by metal-organic vapor phase epitaxy
(MOVPE法により成長させた(001)ダイヤモンド基板上のAlNの成長メカニズム)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 15:57:48 +0900 Updated at: 2026-10-08 07:31:49 +0900