Control of Y2O3-Stabilized ZrO2 Thin Film Orientation by Modified Bias Sputtering.
(新しいバイアススパッタ法によるYSZ薄膜の方位配列の制御.)
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Created at: 2016-05-24 11:34:14 +0900 Updated at: 2026-11-04 05:28:13 +0900