Fabrication of amorphous carbon nitride films by hot-wire chemical vapor deposition
(ホットワイヤー化学気相成長法による非晶質窒化炭素膜の作製)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:48 +0900 Updated at: 2022-11-15 00:39:48 +0900