HOME > 論文 > 書誌詳細Fabrication of GaN cantilever on GaN substrate by photo-electrochemical etchingTakehiro Yamada, Yuto Ando, Hirotaka Watanabe, Yuta Furusawa, Atsushi Tanaka, Manato Deki, Shugo Nitta, Yoshio Honda, Jun Suda, Hiroshi Amano. Applied Physics Express 14 [3] 036505. 2021.https://doi.org/10.35848/1882-0786/abe657 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2021-06-10 03:00:20 +0900 更新時刻: 2026-10-08 06:21:06 +0900
