Defect dependence on depth in ion-implanted Si probed by a positron beam
(陽電子ビームによるSi中のイオン注入欠陥の深さ分布の研究)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:40:56 +0900 Updated at: 2022-11-15 00:40:56 +0900