Erosion Behavior of Physically on Molybdenum During Oxygenated Argon Beam Thinning | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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(Erosion Behavior of Physically on Molybdenum During Oxygenated Argon Beam Thinning)

T.Shikama, M.Fukutomi, M.Okada, T. Shikama, M. Kitajima, M. Fukutomi, M. Okada.

Thin Solid Films 117 [3] 191-199. 1984.

https://doi.org/10.1016/0040-6090(84)90286-4

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作成時刻: 2016-05-24 11:21:46 +0900 更新時刻: 2026-09-30 04:46:22 +0900

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