Growth of cBN films by dc-bias assisted inductively coupled rf plasma chemical vapor deposition
(直流バイアス印加高周波誘導プラズマCVDによるcBN膜合成)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:59:39 +0900 Updated at: 2026-11-02 05:00:13 +0900