Diamond synthesis in capacitively coupled 13.56 MHz radio frequency plasma using parallel plate electrodes with the addition of | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Diamond synthesis in capacitively coupled 13.56 MHz radio frequency plasma using parallel plate electrodes with the addition of

浅倉嘉哉, K.K.Chattopadhyay, 松本精一郎, 平栗健二.

Journal of Vacuum Science and Technology A 3185-3189. 1998.

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作成時刻: 2022-09-05 10:52:39 +0900 更新時刻: 2022-09-05 10:52:39 +0900

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