HOME > 論文 > 書誌詳細Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnectsTakayuki Harada, Zuin Ping Lily Ang, Yuki Sakakibara, Takuro Nagai, Yasushi Masahiro. Applied Physics Letters 126 [22] 221902. 2025.https://doi.org/10.1063/5.0260219 Open Access AIP Publishing (Publisher) Materials Data Repository (MDR) NIMS著者原田 尚之長井 拓郎Materials Data Repository (MDR)上の本文・データセットMDRavailable Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects 作成時刻: 2025-06-11 03:07:43 +0900 更新時刻: 2026-02-19 04:32:46 +0900
