Some Properties of Thin Aluminium Nitride Films Formed in a Glow Discharge | SAMURAI, NIMS Researchers Directory Service

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Some Properties of Thin Aluminium Nitride Films Formed in a Glow Discharge

上村揚一郎, 岩田稔, 田中耕二.

Thin Solid Films 11. 1974.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 10:18:53 +0900 Updated at: 2022-09-05 10:18:53 +0900

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