HOME > Article > DetailCharacterization of descriptors in machine learning for data-based sputtering yield predictionHiori Kino, Kazumasa Ikuse, Hieu-Chi Dam, Satoshi Hamaguchi. Physics of Plasmas 28 [1] 013504. 2021.https://doi.org/10.1063/5.0006816 NIMS author(s)KINO, HioriFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2021-01-14 08:52:42 +0900Updated at: 2024-05-01 06:20:08 +0900
