"published_papers" "Title(English)","Title(Japanese)","Author(s)(English)","Author(s)(Japanese)","Journal name(English)","Journal name(Japanese)","Volume","Number","First page","Last page","Date of publication","Peer reviewed/Not peer reviewed","Invited/Not invited","Publishing type","Language","ISSN","DOI","URL","Description(English)","Description(Japanese)" "Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen","Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen","Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura","Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura","Journal of Vacuum Science & Technology A","Journal of Vacuum Science & Technology A","42","1","","","2024-01-01","TRUE","","scientific_journal","eng","","10.1116/6.0003153","","The operando hydrogen microscope is an original apparatus that has been developed to visualize the time-dependent permeation of hydrogen through a sample. This apparatus is developed based on an ultrahigh vacuum scanning electron microscope (UHV SEM). The system consists of a lens system to focus ions produced by electron-stimulated desorption (ESD), an ion detector optimized for ESD-signal detection, and a two-dimensional measurement program synchronized with the position information of the electron beam. The developed detectors and electrostatic lenses enable highly sensitive detection of the ions. In this paper, we show the details of the instrumentation of the operando hydrogen microscope. We have succeeded in recording hydrogen and deuterium flowing from the rear of metals to the surface as a series of time-lapse images, showing the time-dependent changes in the surface distribution of hydrogen and deuterium. Deuterium permeation through the metal sample was dynamically visualized at the surface by the two-dimensional mapping of the desorbed ions induced by scanning electron beam irradiation.","" "Classification of EBSD Kikuchi Patterns for Stainless Steel by Unsupervised Learning Methods to Investigate Grain Boundaries","Classification of EBSD Kikuchi Patterns for Stainless Steel by Unsupervised Learning Methods to Investigate Grain Boundaries","Satoka Aoyagi, Daisuke Hayashi, Yoshiharu Murase, Naoya Miyauchi, Akiko N. Itakura","Satoka Aoyagi, Daisuke Hayashi, Yoshiharu Murase, Naoya Miyauchi, Akiko N. Itakura","e-Journal of Surface Science and Nanotechnology","e-Journal of Surface Science and Nanotechnology","21","3","128","131","2023","TRUE","","scientific_journal","eng","","10.1380/ejssnt.2023-023","","EBSD indexing based on Kikuchi diffraction patterns, which indicate the types and orientation of the crystal lattice, is generally effective for characterizing crystals. Most regions in a sample can be indexed owing to the simulation of diffraction patterns of possible crystal types, orientations, and angles. However, indexing some of the complex regions related to the grain boundaries, dislocations, and strain areas is difficult. By analyzing all the Kikuchi patterns, subtle information from mixed crystal conditions can be extracted. In this study, all Kikuchi patterns at all pixels in a measurement area of stainless steel were analyzed simultaneously using unsupervised learning methods, such as principal component analysis and multivariate curve resolution, and the pixels of the measurement area were classified based on the Kikuchi patterns to investigate the grain boundaries and dislocations in detail.","" "Activities for diversity in the physics field in Japan","Activities for diversity in the physics field in Japan","Atsushi Masuda, Noriko Chikumoto, Atsuko Ichikawa, Emiko Hiyama, Akiko N. Itakura","Atsushi Masuda, Noriko Chikumoto, Atsuko Ichikawa, Emiko Hiyama, Akiko N. Itakura","AIP Conference Proceedings","AIP Conference Proceedings","3040","1","050021-1","050021-3","2023","TRUE","","scientific_journal","eng","","10.1063/5.0176502","","AIP Conference Proceedings: Women in Physics/ 7th IUPAP International Conference on Women in Physics There are two major academic societies related to physics in Japan: The Japan Society of Applied Physics (JSAP) and The Physical Society of Japan (JPS). This paper introduces current topics on diversity and related issues in both academic societies. The most impressive event is that woman members assumed the presidents in these two societies: Professor Mutsuko Hatano for JSAP (2020-2021 FY) and Professor Setsuko Tajima for JPS (2021 FY). This is the first time for JSAP and the third time for JPS among 34 and 59 successive presidents, respectively. Both of them have a common career path that they moved from industry to academia. It is expected that those presidents not only promote activities related to gender equality, diversity and inclusion in each society but also promote whole activities and open a new era from the women’s viewpoints.","" "SJWS学術誌創刊号の電子化に向けて","SJWS学術誌創刊号の電子化に向けて","板倉 明子, 小川 由起子, 永澤 秀子","板倉 明子, 小川 由起子, 永澤 秀子","日本女性科学者の会学術誌","日本女性科学者の会学術誌","23","0","53","56","2023","TRUE","","scientific_journal","jpn","","10.5939/sjws.230009","","","日本女性科学者の会は、各地の会員が相互に理解を深めるために2001 年 3 月に「日本女性科学者の会学術誌/Journal of The Society of Japanese Women Scientists」を創刊した。 創刊当時は印刷した学術誌を個々の会員に郵送していたが、 2007 年から J-子版ではなく 印刷版 のみが存在していたが、それらのバックナンバーに関しても、順次公開していく。今年の 3 月に創刊号を電子化し公開することとなったため、当時の執筆者らにコンタクトを取り電子化・公開を行った。板倉は本会の理事であるため、過去の出版物の散逸を防ぐための、電子化・公開を担当している。" "オージェ電子 発見 100年 とリーゼ・ マ イ トナー","オージェ電子 発見 100年 とリーゼ・ マ イ トナー","酒井 智香子, 艸分 倫子, 板倉 明子","酒井 智香子, 艸分 倫子, 板倉 明子","日本女性科学者の会学術誌","日本女性科学者の会学術誌","23","0","62","62","2023","TRUE","","scientific_journal","jpn","","10.5939/sjws.230011","","","オージェ電子は、励起状態にある原子の内殻から放出される 特定のエネルギーを持った電子で、 名称は フランスの物理学者ピエール・オージェの名に由来しているが、オージェは最初の発見者ではなく、オージェの発表の2年前、 1923年に オーストリア出身の女性科学者リーゼ・マイトナーによって発見され たことが知られている。今年はオージェ電子発見100年ということで、マイトナーの紹介と、オージェ電子分校の解説を執筆した。" "Attempt to Visualize the Local Hydrogen Permeation through Vanadium Membrane","バナジウム膜を透過する水素の局所可視化の試み","藤丸 朋泰, 木本 裕大, 佐藤 翔一, 宮内 直弥, 永森 繭, 艸分 倫子, 板倉 明子, 松本 佳久","藤丸 朋泰, 木本 裕大, 佐藤 翔一, 宮内 直弥, 永森 繭, 艸分 倫子, 板倉 明子, 松本 佳久","表面と真空","表面と真空","66","10","608","612","2023-10-10","TRUE","","scientific_journal","jpn","","10.1380/vss.66.608","","","オペランド水素顕微鏡を使用して、バナジウム膜を通過する水素の透過を可視化した。初めての試みであるため、実験条件等の最適化を行い、その結果、透過水素の分布と二次電子顕微鏡で観察されるバナジウム粒子の形状との間に良好な相関があることを発見した。詳細な解析には追加の計測や時間がかかるため、まずは実験結果を速報として発表する。" "Think about Harassments and Microaggressions","ハラスメントと低温火傷","板倉 明子, 艸分 倫子, 川岸 京子","板倉 明子, 艸分 倫子, 川岸 京子","表面と真空","表面と真空","66","8","500","501","2023-08-10","TRUE","","scientific_journal","jpn","","10.1380/vss.66.500","","","マイクロアグレッションとは、ハラスメントにはならないものの、政治的文化的に疎外された集団に対する日常の中で行われる言動に現れる偏見や差別に基づく見下しや侮辱、否定的な態度のことである。ダイバーシティ推進を阻害するものであり、アンコンシャスバイアスに根差すものだとされている。また、最近ではSDG’sの複数の項目に対して、達成の障壁となるものだとされており、学会会員に向けての解説を行う。" "Hydrogen sensing and theoretical understanding of absorption phenomena for materials","水素センシングおよび物質への吸蔵現象の理論的解釈","矢ヶ部 太郎, 今村 岳, 吉川 元起, 宮内 直弥, 北島 正弘, 板倉 明子","矢ヶ部 太郎, 今村 岳, 吉川 元起, 宮内 直弥, 北島 正弘, 板倉 明子","表面と真空","表面と真空","66","2","114","119","2023-02-10","TRUE","","scientific_journal","jpn","","10.1380/vss.66.114","","","This report introduces hydrogen sensing with Membrane-type Surface stress Sensor (MSS) coated with two kinds of hydrogen adsorbent materials: Pd and PdCuSi. The equilibrium hydrogen pressure can be measured by detecting surface stress associated with a volume change of the material caused by hydrogen absorption. For Pd on MSS, it takes a long time for the hydrogen absorption reaction to reach saturation. However, it is possible to shorten the determination time by using the initial absorption rate as an index. As for PdCuSi on MSS, it needs a short time to reach saturation. We show that the relationship between the hydrogen concentration and the respective index of the absorption rate or the saturation value of the absorption can be well explained by using a 2-step reaction kinetic model for hydrogen absorption into bulk via adsorption on surface." "オペランド水素顕微鏡による水素透過の可視化","オペランド水素顕微鏡による水素透過の可視化","板倉 明子, 宮内 直弥","板倉 明子, 宮内 直弥","金属","金属","92","3","256","263","2022","TRUE","","scientific_journal","jpn","","","","","オペランド水素顕微鏡の開発とそれを用いた金属材料を透過する水素の可視化について、トピックスとして解説を書くよう依頼された。ステンレスの水素透過、局所透過の画像から、結晶粒ごとの水素の拡散係数と透過フラックスの算出、その結果から推測される構造とその中の水素の拡散モデルの提案について、また水素の拡散防止膜として働く酸化クロム被膜の観察など、2019~2021に英文ジャーナルに発表した内容を日本語で解説した。" "Increasing the Number of Female Science Researchers ∼ Efforts of Natsugaku","理系女性研究者を増やそう~夏学の取組","野呂 知加子, 板倉 明子","野呂 知加子, 板倉 明子","表面と真空","表面と真空","65","12","592","593","2022-12-10","TRUE","","scientific_journal","jpn","","10.1380/vss.65.592","","","日本国内の学協会のうち、100以上の組織のダイバーシティ推進活動の横連携を行う男女共同参画学協会連絡会主催で、国立女性教育会館で行われてきた「女子中高生夏の学校」は、なかなか向上しない日本の女性研究者割合を増やすための活動であり、2020年からはNPO 法人女子中高生理工系キャリアパスプロジェクト の主催で継続している。本年はコロナ流行のためオンライン開催となったが、筆者たちは例年協力しているため、広報の意味も込めて、表面真空学会会員への紹介を行った。" "Evaluation of Surface Damage of Pd Using Cross-Sectional Electron Backscatter Diffraction Analysis","断面電子線後方散乱回折分析を用いたパラジウムの表面損傷の評価","村瀬 義治, 宮内 直弥, 板倉 明子, 片山 英樹","村瀬 義治, 宮内 直弥, 板倉 明子, 片山 英樹","日本金属学会誌","日本金属学会誌","86","11","217","223","2022-11-01","TRUE","","scientific_journal","jpn","","10.2320/jinstmet.j2022021","","","冷間圧延および焼鈍されたPd試料の機械的研磨によって生じた表面損傷を断面電子後方散乱回折(EBSD)測定を用いて調べた。両試料の最外層には、大角粒界を有する微細粒が検出された。焼鈍された試料では、表面下層で結晶粒は明瞭でないものの、結晶方位が層状に徐々に変化している様子が観察された。一方、冷間圧延された試料では、内層全体に多くの細長い結晶粒が検出されたことから、冷間圧延により予め導入された加工組織によって表面下層の形成が妨げられたと推察される。さらに、焼鈍された試料における表面損傷層の深さは、マトリックス粒子の結晶学的配向に依存することが確認された。このように、本研究は金属材料の表面損傷を評価する手法として、断面EBSD分析が有用であることを明確に示した。" "Aging Analysis of Reference Sample Surface Using Helium Ion Microscopy","ヘリウムイオン顕微鏡による表面化学分析用標準試料の経年変化の解析","Keiko ONISHI, Shoko NAGANO, Daisuke FUJITA, Taro YAKABE, Akiko ITAKURA","Keiko ONISHI, Shoko NAGANO, Daisuke FUJITA, Taro YAKABE, Akiko ITAKURA","表面と真空","表面と真空","64","9","424","429","2021","TRUE","","scientific_journal","jpn","","10.1380/vss.64.424","","","ヘリウムイオン顕微鏡は走査電子顕微鏡(SEM)とよく似ているが、HIM二次電子像、HIM後方散乱イオン像、SEM像のコントラストは同一ではない。これまで我々は、様々な材料を同一条件で観察し比較することにより、像コントラストの原因の違いを検討してきているが、今回は、2012年に測定したデータと2020年に測定したデータに一部の元素で経年変化と考えられる違いがある。これは、単純に酸化されやすい元素の画像が変化しているのではなく、酸化膜の厚さと信号深さの組み合わせによって、変化が観察できる元素が決まることを示している。" "Evaluation of Surface Damage of Pd Using Cross-Sectional Electron Backscatter Diffraction Analysis","Evaluation of Surface Damage of Pd Using Cross-Sectional Electron Backscatter Diffraction Analysis","Yoshiharu Murase","Yoshiharu Murase","MATERIALS TRANSACTIONS","MATERIALS TRANSACTIONS","62","1","41","47","2021","TRUE","","scientific_journal","eng","","10.2320/matertrans.mt-m2020220","","Surface damage induced by mechanical polishing of cold-rolled and annealed Pd specimens was examined by cross-sectional electron backscatter diffraction (EBSD) measurements. Fine grains with high-angle grain boundaries were detected in the outermost layer for both specimens. Less granular but layered gradation of crystallographic orientation was detected in the sub-surface layer of the annealed specimen. For the cold-rolled specimen, numerous elongated grains were detected in the entire inner layer. The formation of a sub-surface layer seemed to be prevented in the cold-rolled specimen by pre-introduced microstructures. In the annealed specimen, the depth of the surface damage layer was dependent on the crystallographic orientation of the matrix grain. This study clearly demonstrated the usefulness of cross-sectional EBSD analysis for evaluating surface damage layer in metallic materials.","" "Multimodal Data Analysis for Evaluating Hydrogen Diffusion in Steel","鉄鋼試料中水素拡散評価を目指したマルチモーダルデータ解析","Satoka AOYAGI, Tomomi AKIYAMA, Natsumi SUZUKI, Naoya MIYAUCHI, Akiko N. ITAKURA","Satoka AOYAGI, Tomomi AKIYAMA, Natsumi SUZUKI, Naoya MIYAUCHI, Akiko N. ITAKURA","表面と真空","表面と真空","64","10","472","475","2021","TRUE","","scientific_journal","jpn","","10.1380/vss.64.472","","","Multimodal data analysis provides useful information that is not generally obtained from one of the analysis methods. In this study, time-course images of hydrogen distribution on a steel sample measured using electron stimulated desorption (ESD), scanning electron microscopy (SEM) images and electron backscatter diffraction (EBSD) images were fused to create a multimodal image data set. The fused multimodal images were analyzed by principal component analysis, least absolute shrinkage and selection operator (LASSO) and autoencoder. Each method is one of the most popular methods in each field, multivariate analysis, sparse modeling, and unsupervised learning based on artificial neural networks, respectively. The results of PCA, LASSO and autoencoder were consistent, and each method provides different aspects of the sample data information." "Proposal of diffusion model obtained from time-resolved hydrogen permeation measurement with operand hydrogen microscopes","オペランド水素顕微鏡による時間分解水素透過測定から求める拡散モデルの提案","Akiko N. ITAKURA, Yoshiharu MURASE, Taro YAKABE, Naoya MIYAUCHI, Masahiro KITAJIMA, Satoka AOYAGI","Akiko N. ITAKURA, Yoshiharu MURASE, Taro YAKABE, Naoya MIYAUCHI, Masahiro KITAJIMA, Satoka AOYAGI","表面と真空","表面と真空","","","568","574","2021","TRUE","","scientific_journal","jpn","","10.1380/vss.64.568","","","One of the biggest issues in the hydrogen economy is “hydrogen embrittlement” of metal induced by hydrogen entering and diffusing into the material. Hydrogen diffusion in metallic materials is difficult to grasp owing to the non-uniform compositions and structures of metal. Here a time-resolved “operando hydrogen microscope” was used to interpret local diffusion behavior of hydrogen in the microstructure of a stainless steel with austenite and martensite structures. The martensite/austenite ratios differed in each local region of the sample. The path of hydrogen permeation was inferred from the time evolution of hydrogen permeation in several regions. We proposed a model of hydrogen diffusion in a dual-structure material and verified the validity of the model by simulations." "Model of local hydrogen permeability in stainless steel with two coexisting structures","Model of local hydrogen permeability in stainless steel with two coexisting structures","Akiko N. Itakura, Naoya Miyauchi, Yoshiharu Murase, Taro Yakabe, Masahiro Kitajima, Satoka Aoyagi","Akiko N. Itakura, Naoya Miyauchi, Yoshiharu Murase, Taro Yakabe, Masahiro Kitajima, Satoka Aoyagi","Scientific Reports","Scientific Reports","11","1","","","2021-12-01","TRUE","","scientific_journal","eng","","10.1038/s41598-021-87727-5","","The dynamics of hydrogen in metals with mixed grain structure is not well understood at a microscopic scale. One of the biggest issues facing the hydrogen economy is “hydrogen embrittlement” of metal induced by hydrogen entering and diffusing into the material. Hydrogen diffusion in metallic materials is difficult to grasp owing to the non-uniform compositions and structures of metal. Here a time-resolved “operando hydrogen microscope” was used to interpret local diffusion behaviour of hydrogen in the microstructure of a stainless steel with austenite and martensite structures. The martensite/austenite ratios differed in each local region of the sample. The path of hydrogen permeation was inferred from the time evolution of hydrogen permeation in several regions. We proposed a model of hydrogen diffusion in a dual-structure material and verified the validity of the model by simulations that took into account the transfer of hydrogen at the interfaces.","" "2-step reaction kinetics for hydrogen absorption into bulk material via dissociative adsorption on the surface","2-step reaction kinetics for hydrogen absorption into bulk material via dissociative adsorption on the surface","Taro Yakabe, Gaku Imamura, Genki Yoshikawa, Naoya Miyauchi, Masahiro Kitajima, Akiko N. Itakura","Taro Yakabe, Gaku Imamura, Genki Yoshikawa, Naoya Miyauchi, Masahiro Kitajima, Akiko N. Itakura","Scientific Reports","Scientific Reports","11","1","","","2021-12-01","TRUE","","scientific_journal","eng","","10.1038/s41598-021-98347-4","","We have demonstrated that the process of hydrogen absorption into a solid experimentally follows a Langmuir-type (hyperbolic) function instead of Sieverts law. This can be explained by independent two theories. One is the well-known solubility theory which is the basis of Sieverts law. It explains that the amount of hydrogen absorption can be expressed as a Langmuir-type (hyperbolic) function of the square root of the hydrogen pressure. We have succeeded in drawing the same conclusion from the other theory. It is a 2-step reaction kinetics (2sRK) model that expresses absorption into the bulk via adsorption on the surface. The 2sRK model has an advantage to the solubility theory: Since it can describe the dynamic process, it can be used to discuss both the amount of hydrogen absorption and the absorption rate. Some phenomena with absorption via adsorption can be understood in a unified manner by the 2sRK model.","" "水素の動きを可視化する-オペランド水素顕微鏡の開発-","水素の動きを可視化する-オペランド水素顕微鏡の開発-","板倉 明子","板倉 明子","WE-COMマガジン","WE-COMマガジン","","","37-1-3-1","37-1-3-12","2020","TRUE","","scientific_journal","jpn","","","","","水素は移動しやすく、一部の試料には溶解しにくく、これまでの既存の手法では構造材料を試料とした時の水素画像を取得することは難しかった。試料背面から水素を供給しつつ、時間制限なしで、電子衝撃脱離(ESD)の測定を続けることのできるオペランド水素顕微鏡は、この問題を解決するものと期待できる。ESDの実験には超高真空環境が必要であるが、この解説ではそれを含め、実験装置の開発の詳細と、いくつかの計測の例を述べる。" "Time resolved visualization of permeated hydrogen through metal materials","金属板を透過した水素の実時間可視化","板倉 明子","板倉 明子","軽金属","軽金属","70","12","556","561","2020","TRUE","","scientific_journal","jpn","","10.2464/jilm.70.556","","","水素は移動しやすく、どこにでも入り込む一方、既存の電子分光などの手法では(構造材料を試料とした時の)水素存在位置の画像を取得することは難しかった。試料背面から水素を供給しつつ、時間制限なしで、電子衝撃脱離(ESD)の測定を続けることのできるオペランド水素顕微鏡は、この問題を解決するものである。ESDの実験には超高真空環境が必要であるが、この解説ではそれを含め、実験装置の開発の詳細と、いくつかの計測、特に金属に限定した例を述べる。" "Visualization of local hydrogen diffusion in stainless steel using time resolved electron stimulated desorption","Visualization of local hydrogen diffusion in stainless steel using time resolved electron stimulated desorption","Naoya Miyauchi, Tomoya Iwasawa, Yoshiharu Murase, Taro Yakabe, Masahiro Kitajima, Shoji Takagi, Tomomi Akiyama, Satoka Aoyagi, Akiko N. Itakura","Naoya Miyauchi, Tomoya Iwasawa, Yoshiharu Murase, Taro Yakabe, Masahiro Kitajima, Shoji Takagi, Tomomi Akiyama, Satoka Aoyagi, Akiko N. Itakura","Applied Surface Science","Applied Surface Science","527","","146710","","2020-10-01","TRUE","","scientific_journal","eng","","10.1016/j.apsusc.2020.146710","","We have improved an electron stimulated desorption (ESD) apparatus to obtain the time evolution of hydrogen permeation for cold-worked stainless steel. Hydrogen permeation through grain structures was visualized by using the operando hydrogen microscope combining ESD and hydrogen supply system. The diffusion coefficients in grains were calculated from time evolution curves of hydrogen permeation. Principal component analysis (PCA) of hydrogen maps was used to classify crystal grains by the degrees of hydrogen diffusion and permeation flux. Grain structures such as the ratio of austenite/martensite, crystallographic orientations and coherent/random grain boundaries were determined by electron backscatter diffraction (EBSD) analysis. The areas with high-speed and high flux permeation of hydrogen were characterized as smaller austenitic grains with grain boundaries. The usefulness of a combined ESD-PCA-EBSD analysis on hydrogen permeation in materials was demonstrated in the present study.","" "Fusion data analysis of imaging data of hydrogen-permeated steel obtained by complementary methods","Fusion data analysis of imaging data of hydrogen-permeated steel obtained by complementary methods","Tomomi Akiyama, Naoya Miyauchi, Akiko N. Itakura, Takayuki Yamagishi, Satoka Aoyagi","Tomomi Akiyama, Naoya Miyauchi, Akiko N. Itakura, Takayuki Yamagishi, Satoka Aoyagi","Journal of Vacuum Science & Technology B","Journal of Vacuum Science & Technology B","38","3","034007","","2020-05-01","TRUE","","scientific_journal","eng","","10.1116/6.0000009","","オペランド水素顕微鏡で取得したステンレス鋼透過水素の時間応答挙動を、電子顕微鏡画像との画像融合後に数種の計算科学的手法で解析した。 主成分分析(PCA)、スパースモデリングの代表であるLASSO、ニューラルネットワークを使用した次元圧縮のひとつであるオートエンコーダ、で構造解析画像と水素分布画像を解析し、これらの手法が構造と水素vs構造の材料評価に有力であることがわかった。また、局所水素透過の画像解析を計算科学的解釈に行うことで、よりこれまで見えていなかったより複雑な(複数の構造が関与していると推測できる)拡散挙動を抽出した。","" "Hydrogen detection using membrane-type surface stress sensor","Hydrogen detection using membrane-type surface stress sensor","Taro Yakabe, Gaku Imamura, Genki Yoshikawa, Masahiro Kitajima, Akiko N Itakura","Taro Yakabe, Gaku Imamura, Genki Yoshikawa, Masahiro Kitajima, Akiko N Itakura","Journal of Physics Communications","Journal of Physics Communications","4","2","025005","","2020-02-13","TRUE","","scientific_journal","eng","","10.1088/2399-6528/ab7319","","This study shows a possibility of the application of a membrane-type surface stress sensor (MSS) with a Pd film to a hydrogen sensor. It was able to detect hydrogen concentrations from 5 to 40000 ppm in a nitrogen gas mixture. In the case of a conventional sensor using a hydrogen-occluding material, it is necessary to wait for a state of saturation. In contrast, the proposed method can detect hydrogen quickly by the initial rate of hydrogen absorption. The relationship between the initial absorption rate and hydrogen concentration is explained by considering the two-step reaction kinetics of hydrogen absorption into bulk Pd via Langmuir dissociative adsorption on surface.","" "Two Dimensional Visualization of Hydrogen Permeated through a Stainless Steel Membrane","ステンレス鋼を透過した水素の二次元画像化","板倉 明子, 青柳里果, 村瀬 義治, 矢ヶ部 太郎, 高木祥示, 岩澤 智也, 宮内 直弥","板倉 明子, 青柳里果, 村瀬 義治, 矢ヶ部 太郎, 高木祥示, 岩澤 智也, 宮内 直弥","Proceedings of the International Offshore and Polar Engineering Conference","Proceedings of the International Offshore and Polar Engineering Conference","","","4194","4198","2019","TRUE","","scientific_journal","eng","","","","Hydrogen permeation of a metal was visualized by two-dimensional mapping of hydrogen ion desorbed from the surface by scanning electron beam irradiation. Sample was stainless steel containing dislocations of martensite and we detected a good correlation between the patterns of the hydrogen permeation sites and the grain shape observed in secondary electron images. Stainless steel coated with permeation barrier layer was compared with the bare one. Coating layer was made by surface segregation of the chromium. Coating layer lowered hydrogen outgas, but a large outgassing was detected from the hole-like-defects on coated surface. The position was coincident with the depletion of chromium oxide.","" "Observation of Metal Surface by Operando Hydrogen Microscope","オペランド水素顕微鏡による水素分布の観測","宮内 直弥, 岩澤 智也, 村瀬 義治, 髙木 祥示, 板倉 明子","宮内 直弥, 岩澤 智也, 村瀬 義治, 髙木 祥示, 板倉 明子","表面と真空","表面と真空","62","1","27","32","2019","TRUE","","scientific_journal","jpn","","10.1380/vss.62.27","","","金属試料背面から,水素を供給し透過水素を可視化するオペランド顕微鏡についてまとめた." "Visualization and characterization of localized outgassing position on surface-treated specimens: Chromium oxide layer on stainless steel","Visualization and characterization of localized outgassing position on surface-treated specimens: Chromium oxide layer on stainless steel","Naoya Miyauchi, Tomoya Iwasawa, Taro Yakabe, Masahiro Tosa, Toyohiko Shindo, Shoji Takagi, Akiko N. Itakura","Naoya Miyauchi, Tomoya Iwasawa, Taro Yakabe, Masahiro Tosa, Toyohiko Shindo, Shoji Takagi, Akiko N. Itakura","Applied Surface Science","Applied Surface Science","492","","280","284","2019-10-01","TRUE","","scientific_journal","eng","","10.1016/j.apsusc.2019.06.172","","Hydrogen outgassing from a metal surface and a coated metal surface was visualized by two-dimensional mapping of hydrogen ions desorbed upon scanning electron beam irradiation. The samples used were stainless steel covered with a dense chromium oxide layer, and a reference surface of stainless steel. The coating layer was made by using the segregation phenomenon of the metal. Outgassing of hydrogen was detected from the holelike defects on the treated surface. However, hydrogen was not released from all the holelike defects seen in the SEM image. The outgassing positions were positions without chromium, but not all areas without chromium and/or oxygen coincided with outgassing positions.","" "Low Outgas Surface Treatment of Stainless Steel 316L Using Segregated Chromium Oxide Layer","低ガス放出表面としてのSUS316L鋼酸化クロム処理の評価","板倉 明子, 土佐 正弘, 矢ヶ部 太郎, 宮内 直弥, 笠原 章, 宮田 敏光, 進藤 豊彦","板倉 明子, 土佐 正弘, 矢ヶ部 太郎, 宮内 直弥, 笠原 章, 宮田 敏光, 進藤 豊彦","表面と真空","表面と真空","61","10","675","680","2018","TRUE","","scientific_journal","jpn","","10.1380/vss.61.675","","","ステンレス鋼表面に緻密に偏析させた酸化クロム膜の、対大気の吸着・脱離の様子を測定した。酸化クロムは、酸化防止膜として効果があり、それは表面に鉄が存在しない処理を行っている理由である。深さ方向分析および、排気特性を評価し、酸化防止ばかりではなく、超高真空容器の内面処理として、効果があることを確認した。" "Observation of Behavior of Deuterium Permeated Through Stainless Steel","ステンレス鋼を透過した重水素の挙動観察","岩澤 智也, 宮内 直弥, 高木 祥示, 村瀬 義治, 山田 洋一, 板倉 明子, 佐々木 正洋","岩澤 智也, 宮内 直弥, 高木 祥示, 村瀬 義治, 山田 洋一, 板倉 明子, 佐々木 正洋","表面科学学術講演会要旨集","表面科学学術講演会要旨集","","","635","640","2018","TRUE","","scientific_journal","jpn","","10.14886/sssj2008.2018.0_142","","","We have observed permeated deuterium on stainless steel surface by electron stimulated desorption (ESD) method with scanning electron microscope (SEM). The deuterium distribution was obtained by exposing deuterium from backside of sample and ionizing permeated deuterium by scanning electron beam. The deuterium was exposed from backside at 0.1 MPa. The sample is SUS304, which contains martensite dislocations in austenite structure. Thickness and grain size are both about 100 μm. It is found that deuterium concentration on stainless steel surface depends on the grains by comparing the SEM image and the ESD ion map at 473 K." "Young's modulus of plasma-polymerized allylamine films using micromechanical cantilever sensor and laser-based surface acoustic wave techniques","MCSとLAwaveを用いたプラズマ重合アリルアミン膜のヤング率測定","Masaya Toda, Koji Miyake, Li-Qiang Chu, Marjan Zakerin, Renate Förch, Rüdiger Berger, Akiko N. Itakura","Masaya Toda, Koji Miyake, Li-Qiang Chu, Marjan Zakerin, Renate Förch, Rüdiger Berger, Akiko N. Itakura","Plasma Processes and Polymers","Plasma Processes and Polymers","15","9","1800083","","2018-09-01","TRUE","","scientific_journal","eng","","10.1002/ppap.201800083","","Mechanical properties of ultra-thin organic films are fundamentally important in coating applications. Micromechanical cantilever sensor (MCS) and laser-based surface acoustic wave (LA-SAW) techniques were both used to measure Young","" "2D mapping of hydrogen permeation from a stainless steel membrane","2D mapping of hydrogen permeation from a stainless steel membrane","Naoya Miyauchi, Kenichirou Hirata, Yoshiharu Murase, Hiroyuki A. Sakaue, Taro Yakabe, Akiko N. Itakura, Tetsuji Gotoh, Shoji Takagi","Naoya Miyauchi, Kenichirou Hirata, Yoshiharu Murase, Hiroyuki A. Sakaue, Taro Yakabe, Akiko N. Itakura, Tetsuji Gotoh, Shoji Takagi","Scripta Materialia","Scripta Materialia","144","","69","73","2018-02-01","TRUE","","scientific_journal","eng","","10.1016/j.scriptamat.2017.09.026","","ステンレス薄膜を透過する水素を新たに開発した二次元計測システムで計測した.その結果水素透過には,母材の結晶構造などが反映され水素透過に分布があることがわかった.","" "ESD Measurement of Permeated Hydrogen through Stainless Steel Membrane","ステンレス表面上の透過水素分布の観察","宮内 直弥, 鈴木 真司, 髙木 祥示, 後藤 哲二, 村瀬 義治, 板倉 明子","宮内 直弥, 鈴木 真司, 髙木 祥示, 後藤 哲二, 村瀬 義治, 板倉 明子","Journal of the Vacuum Society of Japan","Journal of the Vacuum Society of Japan","58","10","387","391","2015-10-28","TRUE","","scientific_journal","jpn","","10.3131/jvsj2.58.387","","","ステンレス鋼中に外部から侵入する拡散性水素は、脆化の問題や,超高(極高)真空槽における水素透過の問題,また核融合炉材料における燃料である重水素や生成物であるトリチウム回収の観点から重要な問題となっている.本研究ではステンレス鋼中の水素の挙動を明らかにするため,SUS304L薄板(200μm厚)を試料に用い,片面を水素・重水素に曝し,裏面拡散・透過してくる水素・重水素を電子衝撃脱離(ESD)法により検出する。本講演では表面構造を反映した水素脱離の二次元像を発表する。" "Synthesis of grafted phosphorylcholine polymer layers as specific recognition ligands for C-reactive protein focused on grafting density and thickness to achieve highly sensitive detection","C反応性蛋白に対する特異的認識リガンドとしてのグラフトホスホリルコリンポリマー層の合成およびグラフト密度と膜厚の最適化","Yuri Kamon, Yukiya Kitayama, Akiko N. Itakura, Kyoko Fukazawa, Kazuhiko Ishihara, Toshifumi Takeuchi","Yuri Kamon, Yukiya Kitayama, Akiko N. Itakura, Kyoko Fukazawa, Kazuhiko Ishihara, Toshifumi Takeuchi","Physical Chemistry Chemical Physics","Physical Chemistry Chemical Physics","17","15","9951","9958","2015-03-18","TRUE","","scientific_journal","eng","","10.1039/c5cp00469a","","We studied the effects of layer thickness and graft density of poly(2-methacryloyloxyethyl phosphorylcholine) (PMPC) thin layers as specific ligands for the highly sensitive binding of C-reactive protein (CRP), and key parameters to optimize high sensitivity CRP detections using the produced layers were identified. XPS and ellipsometry measurements were used to characterize the modified surfaces. The obtained layers were tested to determine the effects of thickness and graft density on CRP binding performance using surface plasmon resonance employing a 10 mM Tris-HCl running buffer containing 140 mM NaCl and 2 mM CaCl2 (pH 7.4). The CRP and non-specific HSA (human serum albumin) binding behaviors were dramatically dependent on both PMPC layer thickness and graft density.","" "Thin Polyelectrolyte Multilayers Made by Inkjet Printing and Their Characterization by Nanomechanical Cantilever Sensors","インクジェットで作成したポリエレクトライド多層膜のカンチレバーによる特性評価","Masaya Toda, Yun Chen, Sebastian K. Nett, Akiko N. Itakura, Jochen Gutmann, Rüdiger Berger","Masaya Toda, Yun Chen, Sebastian K. Nett, Akiko N. Itakura, Jochen Gutmann, Rüdiger Berger","The Journal of Physical Chemistry C","The Journal of Physical Chemistry C","118","15","8071","8078","2014-04-17","TRUE","","scientific_journal","eng","","10.1021/jp501464j","","Measurements with NMCsensors often reveal only qualitative results. Here we overcome this issue by inkjet printing well-defined polyelectrolyte multilayers (PEM). We present a method that allows fabricating a 40 bilayer (BL) thick and 5 mm long lines made of polyallylamine hydrochloride (PAH) and polystyrene-sulfonate (PSS). NMC sensors were used to quantify the uptake of water in thin PEM. NMC measurements of mass and swelling upon exposure to humidity indicated a thickness depending swelling of the PEM.","" "Effect of Surface Processing on Hydrogen Desorption","水素放出に及ぼすステンレス鋼の表面加工の効果","板倉 明子, 村瀬 義治, 土佐 正弘, 鈴木 真司, 高木 祥示, 後藤 哲二","板倉 明子, 村瀬 義治, 土佐 正弘, 鈴木 真司, 高木 祥示, 後藤 哲二","Journal of the Vacuum Society of Japan","Journal of the Vacuum Society of Japan","57","1","23","26","2014-01-24","TRUE","","scientific_journal","jpn","","10.3131/jvsj2.57.23","","","Electron Stimulated Desorption (ESD) is one of surface analysis techniques used an excitation of adsorbed atoms by electrons. Using a scanning electron beam it is possible to map a two dimensional ESD distribution of adsorbed hydrogen. We detected striped pattern of hydrogen desorption from the stainless steel surface which flattened by the processing with the lathe. The hydrogen gas was supplied to backside of the sample membrane, penetrates the sample inside, and arrives at the surface. The ESD pattern of hydrogen reflects density of the dislocation in martensite that occurred by lathe processing on the austenite steel surface." "UV protection mechanism and property of functional ceramic particles","機能性セラミックス微粒子の紫外線防御機構と特性","打越 哲郎, 板倉 明子, 松永 知佳, 石垣 隆正","打越 哲郎, 板倉 明子, 松永 知佳, 石垣 隆正","表面科学","表面科学","35","1","45","49","2014-01-21","TRUE","","scientific_journal","jpn","","10.1380/jsssj.35.45","","","紫外線は波長によりUVA、UVB、UVCに分類される。このうち、UVBは日焼けの原因となる短波長の紫外線、UVAは、皮膚に深く入り込み、老化、しみ、しわを引き起こす長波長の紫外線である。サンスクリーン剤には、有機系、無機系の2種類があり、それぞれ特徴がある。本報では、二酸化チタンや酸化亜鉛粒子などの無機系材料をとりあげ、バンドギャップや光散乱効果からそれらの紫外線遮蔽のメカニズムについて解説した。このうち、酸化亜鉛微粒子は、UVAの遮蔽効果に優れ、近年特に注目されている材料である。そこで、亜鉛塩の水溶液から均一沈殿法により合成した酸化亜鉛粒子を用いてその特性を実証した最近の実験結果についても紹介した。酸化亜鉛の形態は、先駆体組成、沈殿剤濃度及び反応温度に依存して著しく変化し、形態の異なる粒子では異なる吸収/反射特性が観察された。" "Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors","薄膜の実効的ヤング率測定手法","Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Förch, Rüdiger Berger","Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Förch, Rüdiger Berger","Japanese Journal of Applied Physics","Japanese Journal of Applied Physics","52","11R","110111","","2013-11-01","TRUE","","scientific_journal","eng","","10.7567/jjap.52.110111","","Determination of mechanical properties of thin films, such as the Young’s modulus, is of funda-mental importance when the films are used for coating or for MEMS materials. We show a simple method to calculate the effective Young’s modulus of thin films by comparing lateral and vertical expansions. The stress of the film expansion in lateral direction was measured by means of micro-mechanical cantilever sensor techniques. Lateral expansion ratio was determined from the stress. Vertical expansion can be measured with ellipsometry, SPR and other thickness measurement tools. There would no limit for measurement by the method, even if soft and thin polymer film. We de-tected the influence of humidity on Young’s modulus of a polymer material by the method, for an example. ","" "Stress inversion from initial tensile to compressive side during ultrathin oxide growth of the Si(100) surface","シリコン(100)極薄酸化膜の成長によって生じた引っ張り応力の逆転現象","Masahiro Kitajima, Tetsuya Narushima, Takayuki Kurashina, Akiko N Itakura, Seiichi Takami, Aruba Yamada, Kazuo Teraishi, Akira Miyamoto","Masahiro Kitajima, Tetsuya Narushima, Takayuki Kurashina, Akiko N Itakura, Seiichi Takami, Aruba Yamada, Kazuo Teraishi, Akira Miyamoto","Journal of Physics: Condensed Matter","Journal of Physics: Condensed Matter","25","35","355007","","2013-09-04","TRUE","","scientific_journal","eng","","10.1088/0953-8984/25/35/355007","","We report the real-time observation of the surface stress change during sub-nanometer oxide growth of the Si(100) surface. Oxidation initially induced a rapid buildup of tensile stress up to -1.9×108 N/m2 with the oxide thickness of 0.25 nm, followed by gradual compensation by a compressive stress. The compressive stress saturated at 5×107 N/m2 for an oxide thickness of 1.2 nm. The analysis assisted by theoretical study indicates that the observed initial tensile stress is caused by oxygen bridge-bonding between the Si dimers. Atomistic model calculations considering mutually orthogonal orientations of the Si(100) surface structure reproduce the stress inversion from tensile to compressive side.","" "New approach for gas sensing by the knowridge of surface science and vacuum science. ","真空技術と表面科学を用いた大気分析の新しい展望","板倉 明子","板倉 明子","Journal of the Vacuum Society of Japan","Journal of the Vacuum Society of Japan","55","8","383","388","2012-09-01","TRUE","","scientific_journal","jpn","","10.3131/jvsj2.55.383","","","マイクロカンチレバーを用いたガス分析について、有機薄膜状への気体分子の物理吸着が作りだす表面応力や、反応性のガスを微小応力で検出する方法、また、爆発物から発生するガスや有毒ガスの検出の可能性など、板倉が行った研究と、ガス分析、ガスセンシングの現状を解説する。" "Surface stress, thickness and mass of the first few layers of polyelectrolyte","初期吸着におけるポリエレクトライドの表面ストレスと吸着質量、膜厚","Masaya Toda, Akiko N. Itakura, Shinichi Igarashi, Karsten Büscher, Jochen S. Gutmann, Karlheinz Graf, Rüdiger Berger","Masaya Toda, Akiko N. Itakura, Shinichi Igarashi, Karsten Büscher, Jochen S. Gutmann, Karlheinz Graf, Rüdiger Berger","Langmuir","Langmuir","24","7","3191","3198","2008-04-01","TRUE","","scientific_journal","eng","","10.1021/la7028214","","カンチレバー表面上への液相での選択吸着として、ポリエレクトライドについて成功したので報告を行った。一つのカンチレバーの表裏にカチオン表面とアニオン表面を制御し、選択吸着によるカンチレバーの歪みを検出した。また、XPSデータから、ポリエレクトライドが層状成長していく様子を確認した。","" "Surface Patterning Using Blister Exfoliation Induced by Electron Irradiation","電子照射を利用したブリスター剥離による表面パターニング","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima","Japanese Journal of Applied Physics","Japanese Journal of Applied Physics","46","12","7812","7815","2007-12-01","TRUE","","scientific_journal","eng","","10.1143/jjap.46.7812","","シリコン表面にイオン照射を行うと、表面にブリスター(気泡)ができる。その気泡に電子を照射すると、ストレスのかかったブリスターの外周部分からブリスターがゆっくり崩壊し、いずれ泡の天井部分はがれる。これは比熱的なプロセスなので、たとえばブリスター表面を薄く参加してからブリスターを剥がすと、シリコン部分とシリコン酸化物の二次元パターニングができる。","" "Etching-Enhanced Surface Stress Relaxation during Initial Ozone Oxidation","Etching-Enhanced Surface Stress Relaxation during Initial Ozone Oxidation","Tetsuya Narushima, Masahiro Kitajima, Akiko N. Itakura, Akira Kurokawa, Shingo Ichimura, Kazushi Miki","Tetsuya Narushima, Masahiro Kitajima, Akiko N. Itakura, Akira Kurokawa, Shingo Ichimura, Kazushi Miki","Surface Science","Surface Science","601","5","1384","1388","2007-03-01","TRUE","","scientific_journal","eng","","10.1016/j.susc.2007.01.006","","Initial oxidation via ozone on the Si(100) surface is investigated by measuring surface stress and observing atomic structure via a Scanning Tunneling Microscopy (STM). A similar investigation is also carried out for molecular oxygen and the results are compared. As a result, monotonic increase of the surface stress to the compressive stress side is obtained up to 0.33 N/m for ozone oxidation at room temperature, while molecular oxygen shows only tiny surface stress growth. From the STM observations, it is found that the difference between ozone and molecular oxygen oxidation is the existence of surface etching. As the origin of the surface stress, therefore, the reduction of the intrinsic tensile surface stress due to the reconstructed surface by the etching process is proposed. ","" "Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance s","Swelling signals of polymer films measured by a combination of micromechanical cantilever sensor and surface plasmon resonance s","Shinichi Igarashi, Akiko N. Itakura, Masaya Toda, Masahiro Kitajima, Liqiang Chu, Anye N. Chifen, Renate Förch, Rüdiger Berger","Shinichi Igarashi, Akiko N. Itakura, Masaya Toda, Masahiro Kitajima, Liqiang Chu, Anye N. Chifen, Renate Förch, Rüdiger Berger","Sensors and Actuators B: Chemical","Sensors and Actuators B: Chemical","117","1","43","49","2006-09-01","TRUE","","scientific_journal","eng","","10.1016/j.snb.2005.11.001","","Swelling of plasma-polymerized allylamine films has been investigated with a combination of a micromechanical cantilever sensor (MCS) technique and surface plasmon resonance (SPR) spectroscopy. The bending responses of polymer-coated MCS were compared to simultaneously recorded reflectivity changes recorded by SPR for both, highly crosslinked and low crosslinked plasma-polymerized films in different humidity. Signals attributed to reversible swelling for both plasma polymers were measured. For an increasing humidity the thickness increase of highly crosslinked films was lower than that one of the low crosslinked films. In contrast to that the MCS coated with a highly crosslinked film exhibited a larger deflection. This demonstrates that higher crosslinked plasma-polymerized allylamine film","" "Local Oxidation Induced by Inhomogeneous Stress on Blistered Si Surface ","Local Oxidation Induced by Inhomogeneous Stress on Blistered Si Surface ","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Shinsuke Nakano, Shunsuke Muto, Tetsuo Tanabe, Hiroyuki Yamamoto, Kiichi Hojou","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Shinsuke Nakano, Shunsuke Muto, Tetsuo Tanabe, Hiroyuki Yamamoto, Kiichi Hojou","Japanese Journal of Applied Physics","Japanese Journal of Applied Physics","45","5A","4179","4182","2006-05-01","TRUE","","scientific_journal","eng","","10.1143/jjap.45.4179",""," By utilizing surface stress to modify surface reaction potential and increase surface reactivity, a technique for the two-dimensional patterning of surface chemical reactions may be realized by surface stress modulation. Blister is local protrusion on a solid surface induced by gas ion irradiation, and is considered to create local stress on surface layers. Si(100) substrate was irradiated with H+ (incident energy: 10 keV, fluence: 1 ×1022 m-2) at an angle of 30° to the surface normal. Blisters of 1-5 µm in diameter at the base were formed. After the ion irradiation, the substrate was oxidized. Scanning Auger electron microscopy revealed that, compared with the flat surface, the perimeters of the blisters had a higher oxygen intensity whereas the blister tops had a lower oxygen in","" "Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films","Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Anye N. Chifen, Renate Förch, Rüdiger Berger","Shinichi Igarashi, Akiko N. Itakura, Masahiro Kitajima, Anye N. Chifen, Renate Förch, Rüdiger Berger","Applied Physics Letters","Applied Physics Letters","88","14","143119","","2006-04-03","TRUE","","scientific_journal","eng","","10.1063/1.2183807","","We have investigated the surface stress on Si induced by ultraviolet light irradiation of plasma-polymerized allylamine films deposited on 2 mm thick Si substrates. The applied stress on the Si surfaces was measured by means of micromechanical cantilever sensor technique. Compressive surface stress was initiated during the irradiation of the plasma films in a dry environment, whereas tensile stress was initiated in a humid environment. From Fourier transform infrared spectroscopic observations,the stress is believed to result from the competition between the cross-linking and the oxidation of the plasma polymer coating during the UV-irradiation. A combination of precise control over the film chemical structure as well as the intensity and duration of the UV-irradiation has suggested this t","" "ブリスタリングによる応力変調を利用した局所シリコン酸化の観察","ブリスタリングによる応力変調を利用した局所シリコン酸化の観察","五十嵐 慎一, 板倉 明子, 北島 正弘, 中野 伸祐, 武藤 俊介, 田辺 哲朗, 山本 博之, 北條 喜一","五十嵐 慎一, 板倉 明子, 北島 正弘, 中野 伸祐, 武藤 俊介, 田辺 哲朗, 山本 博之, 北條 喜一","表面科学","表面科学","25","9","562","567","2008-05-19","TRUE","","scientific_journal","jpn","","10.1380/jsssj.25.562","","","表面反応は応力によって制御される。その技術は二次元パターニングの可能性を秘めている。ブリスターはガスイオン照射による表面のふくれであり、局所的な応力分布を生み出すと考えられる。Si(100)表面に水素イオンを照射した。数ミクロンの大きさのブリスターが形成された。イオン照射後に表面を酸化させた。オージェ電子顕微鏡により、平坦な領域に比べ、ブリスターの周縁部で高い酸素強度が、またブリスター頂上部で低い強度が見られた。有限要素法によりブリスターの応力分布を計算で求めた。周縁部では圧縮応力、頂上部では引っ張り応力が印加されていることが分かった。酸素の分布はこの応力分布と一致している。我々の結果は、応力による反応性の違いを反映した酸素パターニングを示している。" "Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface","Relationship between Ozone Oxidation and Stress Evolution on an H-Terminated Si Surface","Akira Kurokawa, Tetsuya Narushima, Ken Nakamura, Hidehiko Nonaka, Shingo Ichimura, Akiko N. Itakura, Masahiro Kitajima","Akira Kurokawa, Tetsuya Narushima, Ken Nakamura, Hidehiko Nonaka, Shingo Ichimura, Akiko N. Itakura, Masahiro Kitajima","Japanese Journal of Applied Physics","Japanese Journal of Applied Physics","43","1","281","286","2004-01-01","TRUE","","scientific_journal","eng","","10.1143/jjap.43.281","","We observed the stress evolution of an H-terminated Si (100) surface during ozone oxidation and the ozone oxidation on a partially H-terminated Si surface of Si (100) and Si (111) to study the surface orientation effect on ozone oxidation. The evolution of stress on the H-terminated Si (100) surface was observed in real-time by an optical micro-mechanical cantilever method. The results show that the stress evolution on the H-terminated Si surface was unexpectedly large when considering that H-termination reduced the sticking amount of oxygen. Both the Si (111) and Si (100) surfaces showed that the rate of ozone oxidation was reduced as hydrogen covered the surfaces. However, at high-H coverage the H-terminated Si (111) surface showed a greater increase of sticking rate than the H-ter",""