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Doping and segregation of impurity atoms in silicon nanowires
(Siナノワイヤ中への不純物ドーピングと不純物の偏析挙動)

FUKATA, Naoki, Masanori Seoka, Naoyuki Saito, SATO, Keisuke, CHEN, Jun, SEKIGUCHI, Takashi, Kouichi Murakami.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-01-08 03:30:14 +0900Updated at: 2017-03-17 05:09:13 +0900

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