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Raw-to-repository characterization data conversion for repeatable, replicable, and reproducible measurements

著者Mineharu Suzuki, Hiroko Nagao, Yoshitomo Harada, Hiroshi Shinotsuka, Katsumi Watanabe, Akito Sasaki, Asahiko Matsuda, Koji Kimoto, Hideki Yoshikawa.
発表誌名JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
発表年2020
言語English
DOIhttps://doi.org/10.1116/1.5128408

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