HOME > Proceedings > DetailHomoepitaxial diamond chemical vapor deposition for ultra-light dopingT. Teraji, J. Isoya, K. Watanabe, S. Koizumi, Y. Koide. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 197-202. 2017.https://doi.org/10.1016/j.mssp.2016.11.012 NIMS author(s)TERAJI, TokuyukiWATANABE, KenjiKOIZUMI, SatoshiKOIDE, YasuoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-08-17 21:46:58 +0900Updated at: 2024-03-30 00:00:37 +0900