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Reduction of dislocation density by cooling optimization in Si crystal growth

JIPTNER, Karolin, HARADA, Hirofumi, MIYAMURA, Yoshiji, Bing Gao, Masayuki Fukuzawa, Koichi Kakimoto, SEKIGUCHI, Takashi.
Reduction of dislocation density by cooling optimization in Si crystal growth 176-181. 2014.

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      Created at: 2017-02-27 02:41:21 +0900Updated at: 2017-03-17 04:55:14 +0900

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