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Carbon-Rich SiOCH Films with Hydrocarbon Network Bonds for Low-k Dielectrics:First-Principles Investigation
(低誘電率材料のための、炭素含有量が多く炭化水素ネットワーク結合を有するＳｉOCH膜：第一原理的研究)

TAJIMA, Nobuo, OHNO, Takahisa, HAMADA, Tomoyuki, YONEDAKatsumi, KOBAYASHINobuyoshi, SHINRIKIManabu, MIYAZAWAKazuhiro, SAKOTAKaoru, HASAKASatoshi, INOUEMinoru.
Proceeding of the 2006 International Interconnect Technology Conference 122-125. 2006.

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