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Composition spread metal thin film fabrication technique based on ion beam sputter deposition

著者PARHAT, AHMET, NAGATA, Takahiro, KUKURUZNYAK, Dmitry, YAGYU, Shinjiro, WAKAYAMA, Yutaka, YOSHITAKE, Michiko, CHIKYOW, Toyohiro.
発表誌名APPLIED SURFACE SCIENCE
発表年2006
言語English

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