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AuthorToshihide Nabatame, Ippei Yamamoto, Tomomi Sawada, Akihiko Ohi, Thang Duy Dao, Tomoji Ohishi, Tadaaki Nagao.
TitleChange of Electrical Properties of Rutile- and Anatase-TiO2 Films by Atomic Layer Deposited Al2O3
(Change of Electrical Properties of Rutile- and Anatase-TiO2 Films By Atomic Layer Deposited Al2O3)
Proceedings titleECS Transactions
Year of publication2019
LanguageEnglish
DOI10.1149/09203.0015ecst
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