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First-Principle Molecular Model of PECVD SiOCH Film for the Mechanical and Dielectric Property Investigation

TAJIMA, Nobuo, HAMADA T, OHNO, Takahisa, 米田克己, 小林伸好, 羽坂智, 井上實.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2017-02-27 00:50:21 +0900 Updated at :2017-03-17 02:50:59 +0900

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