Vacuum Ultraviolet (VUV) and Vapor-Combined Surface Modification for Hybrid Bonding of SiC, GaN, and Si Substrates at Low Tempe | SAMURAI, NIMS Researchers Directory Service

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Vacuum Ultraviolet (VUV) and Vapor-Combined Surface Modification for Hybrid Bonding of SiC, GaN, and Si Substrates at Low Tempe

SHIGETOU, Akitsu, Jun Mizuno, Syuichi Shoji.

Proc. ICEP 2015 239-242. 2015.

NIMS author(s)

SHIGETOU, Akitsu

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-02-27 02:42:40 +0900Updated at: 2017-03-17 04:56:49 +0900

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