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Cu-BN被覆した真空容器の雰囲気圧力安定性
(Stability of pressure in Cu-BN coated vacuum chamber)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 00:11:48 +0900Updated at: 2017-03-17 02:15:34 +0900