FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application
| 著者 | B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto. |
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| 発表誌名 | Nuclear Instruments and Methods in Physics Research B |
| 発表年 | 2012 |
| 言語 | English |
| DOI | https://doi.org/10.1016/j.nimb.2011.01.061 |