SAMURAI - NIMS Researchers Database

HOME > 会議録 > 詳細

FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application

著者B. Zheng, N. Iketa, Y. Takeda, K. Sato, R. Sato, H. Amekura, K. Oyoshi, K. Kono, M.E. Edwards, M. Song, D. Ila, N. Kishimoto.
発表誌名Nuclear Instruments and Methods in Physics Research B
発表年2012
言語English
DOIhttps://doi.org/10.1016/j.nimb.2011.01.061

▲ページトップへ移動