Importance of Annealing Step on Dielectric Constant of ZrO2 Layer of MIM Capacitors with Al2O3/ZrO2 and ZrO2/Al2O3 Stack Structures
| 著者 | Tomomi Sawada, Toshihide Nabatame, Takashi Onaya, Mari Inoue, Akihiko Ohi, Naoki Ikeda, Kazuhito Tsukagoshi. |
|---|---|
| 発表誌名 | ECS Transactions |
| 発表年 | 2021 |
| 言語 | English |
| DOI | https://doi.org/10.1149/10404.0121ecst |