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Observation of leakage sites in high-k gate dielectrics in MOSFET devices by electron-beam-induced current technique

SEKIGUCHI, Takashi, CHEN, Jun, TAKASE, Masami, FUKATA, Naoki, UMEZAWA, Naoto, OHMORI, Kenji, CHIKYOW, Toyohiro, Hasunuma Ryu, Yamabe Kikuo, Inumiya Seiji, Nara Yasuo.
Solid State Phenomena 449-454. 2007.

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