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An Electron-Beam-Induced Current Investigation of Electrical Defects in High-k Gate Stacks
(ＥＢＩＣによてHigh-kゲートスタック構造の欠陥の研究)

CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, NEMOTO, Yoshihiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Keisaku Yamada, CHIKYOW, Toyohiro.
ECS Transcations 299-313. 2010.

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