SAMURAI - NIMS Researchers Database

HOME > Proceedings > Detail

In-situ TEM observation of silicide formation and dopant segregation in Ni fully silicided gates

Takuji Hosoi, Kentaro Shibahara, HASEGAWA, Akira, FURUYA, Kazuo.
Extended Abstracts and Program of ISCSI-V 147-148. 2007.

NIMS author(s)

    Fulltext and dataset(s) on Materials Data Repository (MDR)

      Created at: 2017-02-27 01:26:00 +0900 Updated at: 2017-03-17 03:26:48 +0900

      ▲ Go to the top of this page