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Standardization and quantification of the carrier concentration in semiconductor devices using electric SPM
(電気計測SPMによる半導体微小領域のキャリア濃度定量化と国際標準化)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 02:18:56 +0900 Updated at: 2017-03-17 04:28:44 +0900