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(Formation of SiC and Si3N4 particles in directional solidification Si-growth)
Joint Seminar for Eelectronic Materials (JSEM) 2011. 2011.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:21:58 +0900Updated at: 2017-07-10 21:09:09 +0900