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Si2H6を用いたSiナノワイヤー成長における基板温度と圧力の影響
(Effect of substrate temperature and gas pressure on formation of Si nano-wire with Si2H6)
日本金属学会2007年春期大会. 2007.
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Created at: 2017-01-08 04:47:20 +0900Updated at: 2017-07-10 19:50:00 +0900