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ガス流制御による光安定アモルファスシリコン薄膜成長
(Growth of stable amorphous silicon films by gas-flow controlled RF plasma CVD)
2009年春季第56回応用物理学関係連合講演会. March 30, 2009-April 02, 2009.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:34:21 +0900Updated at: 2017-07-10 20:28:35 +0900